Multiple wavelength reflectance microscopy to study the multiphysical behavior of microelectromechanical systems
نویسندگان
چکیده
منابع مشابه
Multiple wavelength reflectance microscopy to study the multiphysical behavior of microelectromechanical systems.
In order to characterize surface chemomechanical phenomena driving microelectromechanical systems behavior, we propose herein a method to simultaneously obtain a full kinematic field describing the surface displacement and a map of its chemical modification from optical measurements. Using a microscope, reflected intensity fields are recorded for two different illumination wavelengths. Decoupli...
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ژورنال
عنوان ژورنال: Optics Letters
سال: 2011
ISSN: 0146-9592,1539-4794
DOI: 10.1364/ol.36.000594